发明名称 INSPECTING DEVICE FOR TRANSISTOR ELEMENT AND THE LIKE
摘要 PURPOSE:To conduct performance inspection of pellets as they are in the state of being stuck to a tape, by a constitution wherein a needle attached to the end of a lower electrode is made to touch with the lower surface of the pellets through the tape at the uppermost position of the electrode, while an upper electrode is lowered onto the upper surface of the pellets. CONSTITUTION:The upper surface of a bowl-shaped insulator cylinder 9 touching the lower surface of a tape is in contact with the lower surface of pellets through the tape. A rod 10 is inserted through the vertical guide hole of the cylinder 9 and a lower part electrode needle 6 is attached thereto. The rod 10 is moved vertically together with a rod 14 via a spring 7 by the rotation of a cam 12. On the other hand, an upper electrode 5 is moved vertically by the rotation of a cam 13, and the needle 6 touches the tape 1 after the electrode 5 touches the upper surface of the pellets owing to the relation between the cams 12 and 13, and contacts with the lower surface of the pellets through the tape. According to this constitution, separated pellets can be inspected efficiently without being damaged as they are in the state of being stuck to the tape, and thus operations are rationalized.
申请公布号 JPS5814546(A) 申请公布日期 1983.01.27
申请号 JP19810110760 申请日期 1981.07.17
申请人 DAIICHI SEIKI KK 发明人 KAMIKAWACHI HIDEO;OZAKI HARUO
分类号 H01L21/66;G01R31/26 主分类号 H01L21/66
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