| 摘要 |
An ion source having an essentially cylindrical cage anode (6), which is open on one side, and an annular cathode (8), which surrounds the cage anode concentrically, is equipped with exactly parallel ion paths, having an extraction shutter (15), in order to achieve ion beams. This extraction shutter (15) has a central section (16) which is of conical design, tapers in the direction of the cage anode and extends into the interior of said cage anode. <IMAGE>
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