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发明名称
PREVENTION OR REDUCTION OF DECOMPOSITION OF PHORPHORUS CONTAINING SUBSTRATES
摘要
申请公布号
GB2048227(B)
申请公布日期
1983.01.26
申请号
GB19800007560
申请日期
1980.03.05
申请人
VARIAN ASSOCIATES INC
发明人
分类号
C30B19/00;C30B23/02;C30B29/40;H01L21/20;H01L21/208;H01L21/324;(IPC1-7):C01B25/08;C01B25/00
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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