| 摘要 |
PURPOSE:To reduce the cornering of evaporation substances and prevent the generation of metal blacks, by ionizing oxygen gas through ion sources and then introducing partly the oxygen gas with directivity onto an evaporation plane. CONSTITUTION:A polyethylene terephthalate film 3 is made to run around a roll- cylindrical can 2, screening an unnecessary part by a shutter 11, thus heating a Co-Ni alloy (Ni 20 atom%) 6 by an electron beam resulting in evaporation so that the film thickness becomes 1,000Angstrom on the polyethylene terephthalate film 3. Thereat, oxygen ions (O2<+>) 14 are introduced onto the evaporation plane by an ion gun 13 at the rate of 0.35mA/cm<2> in the accelerating voltage 3kV. Besides, the electron beam 16 is simultaneously irradiated onto the evaporation plane so as to neutralize the electric charges of the oxygen ion 14. |
