| 摘要 |
PURPOSE:To obtain a photosensitive element with small dark decay and high resistance which is stable for the influence of temperature and heat histories and does not make remaining potential cycle up by using Se arroy containing a comparatively small quantity of As and Cl balanced to the quantity of As as an evaporation source. CONSTITUTION:A photosensitive element is obtained by using Se-As-Cl three element amorphous arroy as an evaporation source which contains 5-300ppm Cl and 0.01-0.5wt% As respectively to Se so that the ratio of ppm value to wt% value is 250-1,200 and forming a photoconductive layer on a substrate by evaporation or the like with tool of 5X10<-4> at the conductive temp. of about 70 deg.C and the evaporation source temp. of 330 deg.C. It is permitted to apply an insulating layer to the surface of the photoconductive layer. By said configuration, a photosensitive element with superior resistance which does not raise its dark amplitude by the influences of temperature and heat histories is obtained and the element is also adapted to high speed copying. |
