| 摘要 |
By scanning a rough, uneven, undulating (corrugated) surface of an object (17) by means of a television camera (7) which is moved to and fro transversely over said surface without special height adjustment and as parallel as possible thereto, contains an optoelectric transducer and has a storage plate (5) situated obliquely relative to the scanned surface, it is possible to determine height profiles and, at the same time, values of reflectivity for the surface thus scanned, specifically due to connection of an appropriately programmed digital computer at the signal output of the television camera (7). However, it is presupposed that the focal length (f) of the lens (3) and the object distance (a) to the surface to be scanned are tuned appropriately to one another in conjunction with as small as possible a depth of focus (field) of the lens (3) assigned to the optoelectric transducer. A television camera (7) equipped in such a way and guided relative to the surface to be scanned can be used to prepare both micrographs in the production of, e.g. monolithically integrated semiconductor circuits, and macrophotographs, e.g. in satellite photography, in conjunction with appropriate adaptation. <IMAGE>
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