| 摘要 |
PURPOSE:To prevent the crystal defects such as dislocation, lineage structure, etc. of pulled single crystal, by positioning the bottom of the side wall part of a side face type crucible in the lower direction than the bottom plate part of the crucible, separating the bottom plate part form the side wall part. CONSTITUTION:The crucible 1 is not integrated, divided into the cylindrical side wall A and the discoidal bottom plate B, and the bottom of the side wall A is positioned in the lower direction than the bottom plate B. The material of the bottom plate B has a lower thermal conductivity than that of the side wall A. For example, when carbon is used as the material of the side wall A, quartz, BN, PBN, Si3N4, etc. are used as the material for the bottom plate B. As mentioned above, when the bottom plate B is separated from the side wall A, and the material having a lower thermal conductivity is used as the material of the bottom plate B, the heat conduction from the side wall A to the bottom plate B is controlled, to attain the desired purpose. |
