,申请号FR19770028523-传众专利搜索

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发明名称
摘要
申请公布号	FR2369610(B1)	申请公布日期	1980.01.04
申请号	FR19770028523	申请日期	1977.09.14
申请人	IBM	发明人
分类号	H01L21/027;G03F7/20;H01L21/68;H01L21/683;(IPC1-7):G05B11/44;G03F9/00;H01L21/30	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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