| 摘要 |
PURPOSE:To decide arbitrary patterns automatically and accurately by processing the image information read by an image sensor with a microcomputer. CONSTITUTION:In a sensor part 100, the patterns on a substrate 1 are made into image information by means of a sensor 2 driven by a driving circuit 3 and a roller 7 driven by a motor 6 and this information is read into a CPU5 via an AD converter 4. The original picture which is read first is stored in a hard disc 12, and the position reference and inspection area of the original picture are assigned by the operation of a master CPU9. While viewing a part of the specimen on a display 14, the operator enlarges said patterns with a slave system 500 and erases pinholes alpha and pattern cuts beta, then the patterns are reduced and the defective parts are detected by arithmetic operations. |
