| 摘要 |
PURPOSE:To obtain an electrode having a small specific resistance and good electrochemical stability, by making a transparent conductive film a two-layer structure having a layer consisting essentially of tin oxide and a layer consisting essentially of indium oxide. CONSTITUTION:A tin oxide transparent conductive film making the first layer is prepared in 50Angstrom -500Angstrom layer thickness on transparent substrates 1 consisting of glass, plastics and ceramics, etc. by CVD, sputtering, vapor-depositing, spraying methods and solution immersion method, etc. This product shows about - 10OMEGAcm specific resistance. Thereon, an indium oxide transparent conductive film 3 making the second layer is obtained in 50Angstrom -500Angstrom film thickness on the first layer by the same methods. This product shows about -10OMEGAcm specific resistance. The total film thickness of the first and the second layers is preferably 50Angstrom -500Angstrom and more desirably 200Angstrom -500Angstrom , and the ratio of the film thickness is made preferably 1:1. A transparent conductive film having high reliability under a high temp. and high humidity atmosphere and a small specific resistance is obtained. |
