| 发明名称 |
Method of fabricating piezoelectric thin film |
| 摘要 |
In a method of fabricating a piezoelectric thin film of zinc oxide by means of a sputtering process, zinc and alkaline earth metal are sputtered together in an oxygen atmosphere to thereby produce zinc oxide containing the alkaline earth metal.
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| 申请公布号 |
US4233135(A) |
申请公布日期 |
1980.11.11 |
| 申请号 |
US19790012536 |
申请日期 |
1979.02.15 |
| 申请人 |
TOKO, INC. |
发明人 |
SAKAKURA, MITSUO;TAKAKU, TETSUO |
| 分类号 |
C23C14/06;C23C14/08;C23C14/14;C30B28/12;C30B29/16;H01L41/18;H01L41/24;H03H3/08;(IPC1-7):C23C15/00 |
主分类号 |
C23C14/06 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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