| 摘要 |
PURPOSE:To effectively improve a insulation breakdown voltage and to obtain a large ultrasonic wave output, by providing an isolating thin film between the 1st electrode and a piezoelectric thin film and between the 2nd electrode and a piezoelectric thin film respectively. CONSTITUTION:The isolation thin film 6 is newly provided between the 1st electrode 1 and the piezoelectric thin film 2 and between the 2nd electrode 3 and the piezoelectric thin film 2 respectively. With such construction, the current flowing instantly due to the insulation breakdown of the failed part of the piezoelectric thin film 2 such as ZnO thin film can be blocked, allowing to block the destruction of total ZnO thin film and piezoelectric thin film 2 due to Joule heat. Thus, large ultrasonic wave output is obtained. |
