Differential pressure sensor

摘要

The differential pressure sensor for the low-temperature range and for use in the range of action of a high centrifugal acceleration consists essentially of a permanent magnet and a diaphragm arranged in front of the end face thereof. The permanent magnet and diaphragm are arranged in a housing, the volume of which is divided into two chambers by the diaphragm. A magnetic field detector (Hall probe, or a transistor sensitive to magentic fields, or a resistor or a component employing the Josephson effect) is arranged on the end face of the permanent magnet. The surface of the diaphragm facing the permanent magnet has a superconducting coating on which the permanent magnet is reflected, as it were. As a result, the diaphragm always remains in a plane of symmetry of the magnetic field, even in the case of changes in position due to the differential pressure acting on it. The magnetic induction of the magnetic field is changed by movements of the diaphragm.