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发明名称
SLIT EXPOSURE DEVICE
摘要
申请公布号
EP0045102(A3)
申请公布日期
1982.02.10
申请号
EP19810200758
申请日期
1981.07.03
申请人
OCE-NEDERLAND B.V.
发明人
HOVENS, PETRUS JOHANNES PETRONELLA;WILLEMSE, ADRIANUS HENRICUS
分类号
G03B27/50;G03B27/52;G03G15/04;G03G15/28;(IPC1-7):G03B27/52
主分类号
G03B27/50
代理机构
代理人
主权项
地址
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