| 摘要 |
PURPOSE:To obtain the titled film while amplifying development only by electron beam irradiation by irradiating electron beams to a fluoroalkyl acrylate (co)polymer film formed on a substrate by a plasma polymn. method and by heating the film to a temp. above the glass transition point. CONSTITUTION:Fluoroalkyl acrylate represented by formulaI(where Rf is 1- 15C perfluoroalkyl or a group having >=1 F atom obtd. by substituting H for >=1 F atom in the perfluoroalkyl; R<1> is H, methyl, ethyl or halogen; and R<2> is a bivalent hydrocarbon residue), e.g., the compound of formula II or III is polymerized or copolymerized with other polymerizable substance such as ethylene or vinyl chloride by a plasma polymn. method to form a film of a fluoroalkyl acrylate (co)polymer or a mixture of a fluoroalkyl acrylate homopolymer with a homopolymer of other polymerizable substance on a substrate, and a electron beams are irradiated to the film. The film is then heated to a temp. above the glass transition point of the constituent polymer of the film under reduced pressure to manufacture the titled film. |
