发明名称 Epitaxial composite and method of making
摘要 An epitaxial composite comprising a thin film of single crystal Group III-V wide band-gap compound semiconductor or semiconductor alloy on single crystal, electrically insulating oxide substrates such as sapphire, spinel, BeO, ThO2, or the like, and on III-V semiconductors or alloys. The thin film may be produced in situ on a heated substrate by reaction of an organic compound containing the Group III constituent, typically the alkyl metal organic, such as trimethylgallium and/or triethylgallium with a Group V hydride such as arsine, phosphine and/or stibine.
申请公布号 US4368098(A) 申请公布日期 1983.01.11
申请号 US19780894367 申请日期 1978.04.07
申请人 ROCKWELL INTERNATIONAL CORPORATION 发明人 MANASEVIT, HAROLD M.
分类号 C30B25/02;C30B25/20;H01L21/00;H01L21/20;H01L21/205;H01L21/86;(IPC1-7):C30B25/02;C30B25/10;C30B25/18 主分类号 C30B25/02
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