发明名称 Implantation of electrical feed-through conductors
摘要 Electrically conductive solid, dense feed-through paths for the high-speed low-loss transfer of electrical signals between integrated circuits of a single silicon-on-sapphire body, or between integrated circuits of several silicon-on-sapphire bodies, are provided by an electroforming method.
申请公布号 US4368106(A) 申请公布日期 1983.01.11
申请号 US19810285656 申请日期 1981.07.21
申请人 GENERAL ELECTRIC COMPANY 发明人 ANTHONY, THOMAS R.
分类号 H01L21/48;H01L23/538;H05K1/03;H05K3/42;(IPC1-7):C25D5/02;C25D7/04 主分类号 H01L21/48
代理机构 代理人
主权项
地址