发明名称 SOS island edge passivation structure
摘要 A silicon-on-sapphire semiconductor structure, and method of fabricating such structure, in which a silicone nitride layer is provided over the oxide layer. The silicon nitride layer is disposed over the upper edge of the silicon island, and acts to prevent gate oxide breakdown.
申请公布号 US4368085(A) 申请公布日期 1983.01.11
申请号 US19800166950 申请日期 1980.07.08
申请人 ROCKWELL INTERNATIONAL CORPORATION 发明人 PEEL, JOHN L.
分类号 H01L27/12;H01L29/423;H01L29/49;H01L29/51;H01L29/786;(IPC1-7):H01L27/12 主分类号 H01L27/12
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