HEAT GENERATING RESISTOR FOR HEAT SENSITIVE RECORDING HEAD AND PRODUCTION THEREOF

摘要

PURPOSE:To produce a heat generating resistor which is free from cracks in its oxidation resisting layer and wear resisting layer by such an arrangement wherein the outer circumference of an adhesion layer pattern at the upper layer of a heat generating resistor layer is formed inside the outer circumference of the resistor layer and the outer circumference of a wiring layer pattern at the upper layer of the adhesion layer is formed inside the outer circumference of the adhesion layer. CONSTITUTION:A glazed glass layer 2 and an etching resisting layer 3 of a resistor are formed on a substrate 1 and a wiring unit is formed by providing a resistor layer 4, an adhesion layer 5 and a wiring layer 6 on the substrate by photoetching method. At this time, etching is performed in the order of the wiring layer 6, adhesion layer 5 and resistor layer 4, and after that reetching is performed in the order of the adhesion layer 5 and the wiring layer 6 and by this the adhesion layer 5 and the wiring layer 6 are properly shaped to the free from overhangs. In forming a resistor unit, etching is performed in the order of the wiring layer 6 and the adhesion layer 5 and then the wiring layer 6 is reetched. Said heat generating resistor can be obtained by forming an oxidation resisting layer 7 of the resistor and a wear resisting layer 8 in the next stage.