| 摘要 |
PURPOSE:To balance a rotor, which is rotated in a high speed in a vacuous vessel, automatically and quickly with high precision without releasing the vacuum state, by irradiating a laser light to the surface of a rotor. CONSTITUTION:The oscillation of a rotor 2 rotating in a vacuous vessel 1 is detected by an oscillation sensor 4, and a phase reference signal is generated by a pulse sensor 5 and is inputted to a pulse shaping equipment 7. The output of the shaping equipment 7 and the output of an amplifier 6 are sent to a computer 9 through a tracking filter 8. In the computer 9, the waveform is analyzed, and the balance is analyzed on the basis of stored influence coefficients, and the number of pulses of laser irradiation and the irradiation phase required for correction are sent to a laser controller 10. The controller 10 sends a trigger pulse signal to a laser oscillator 11 to oscillate a pulse laser light l. This laser light l is condensed onto the surface of the rotor 2 through a condenser lens 12. |
