| 摘要 |
PURPOSE:To align gravity positions highly accurately, by irradiating a plurality of light beams having equal inclined angle with respect to the direction perpendicular to the plate bodies to two similar plate bodies which are arranged in parallel, and adjusting the positions so that the light beams contact the outside of the two plate bodies. CONSTITUTION:The crossing light beams 15a and 15b having the equal angle with respect to the direction Z are irradiated on the piezoelectric element substrate 11 and a vibrating plate 14 which are arranged in parallel. The light beams 15a and 15b are outputted from light sources 16a and 16b through collimator lenses 17a and 17b and received by light receiving devices 19a and 19b through slit plates 18a and 18b. The piezoelectric element substrate 11 and the vibrating plate 14 are moved in the directions of X, Y, and Z so that the light beams 15a and 15b are contacted with outer peripheries of the piezoelectric element substrate 11 and the vibrating plate 14. Thus the positioning of the gravity centers ca be performed highly accurately. |
