| 摘要 |
PURPOSE:To produce an electrophotographic receptor superior in photo-conductive characteristics and mechanical property through a simple manufacturing process using unpolluting materials, by laminating a photoconductive layer containing fluorinated and hydrogenated amorphous silicon on a conductive substrate. CONSTITUTION:An aluminum drum is provided, e.g., in the vacuum vessel of an inductively coupled glow discharge apparatus, and held at 250 deg.C with a heater. After the vessel has been evacuated to 5X10<-7> Torr, a 10:1 gaseous mixture of SiF4 and H2 is introduced by controlling a flow rate so as to maintain pressure at 2 Torr. Glow discharge is caused by applying 13.56MHz, 100W high frequency to form a photoconductive layer on the aluminum drum. This layer consists of amorphous silicon containing a few % fluorine and 1% hydrogen, thus permitting an electrophotographic receptor superior in photoconductive characteristics and mechnical property to be manufactured through a simple process using unpolluting mateials. |
