发明名称 METHOD OF REMOVING RESIN BURR IN RESIN SEALED SEMICONDUCTOR DEVICE
摘要 PURPOSE:To remove a resin burr without applying a protecting mask on the resin mold layer by employing a mixture of thermosetting resin particles and glass beads as a grinding agent in the wet-honing method. CONSTITUTION:When forming a resin mold layer 1, the resin leaking out of a molding chamber adheres on the surface of outer leads 3, whereby resin burrs 6 are produced thereon. The resin burrs 6 are removed by spraying water containing a grinding agent on a resin-sealed semiconductor element from a jet nozzle. At this time, a mixture dualistically comprising thermosetting resin particles and glass beads at a composite ratio of approximately 1:1 is employed as a grinding agent. In the case of adding the grinding agent, for example, 2 parts of thermosetting resin particles and one part of glass beads by weight ratio are mixed together.
申请公布号 JPS59232429(A) 申请公布日期 1984.12.27
申请号 JP19830108122 申请日期 1983.06.16
申请人 TOSHIBA KK 发明人 KUDOU MASAHIDE;ONO TAKASHI;KAWASHIMA TAKASHI
分类号 H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L21/56
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