| 发明名称 |
Apparatus for peeling protective film off a thin article |
| 摘要 |
Apparatus for peeling a protective film off a thin article such as a silicon wafer is disclosed. The film is peeled by sticking an adhesive tape to the protective film on the article and pulling it away from the article. The protective film is peeled by the apparatus only by the adhesive force of the adhesive tape.
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| 申请公布号 |
US4732642(A) |
申请公布日期 |
1988.03.22 |
| 申请号 |
US19860900952 |
申请日期 |
1986.08.27 |
| 申请人 |
NITTO ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
AMETANI, MINORU |
| 分类号 |
B29C63/00;H01L21/00;H01L21/56;(IPC1-7):B32B1/00;B32B31/00 |
主分类号 |
B29C63/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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