| 摘要 |
PURPOSE:To improve workability of scribe action or property check, by a method wherein a projection of semiconductor wafer is enclosed in a relief portion of a supporter, flat portion is received on the supporter, and the wafer is held at normal attitude. CONSTITUTION:Flat portions 8 are formed at the center and a periphery of a wafer 1 with surface having projections 2. Upper surface of a working stage 6 (supporter) is provided with a relief portion 9 which corresponds to position of the projections 2 and enclose them, and suction hole 10 is provided on a support surface 6a of the flat portion 8. Otherwise, electron wax 4 may be applied to the flat portion, the projection 2 may be enclosed within a relief portion 11, and the flat portion 8 may be applied to a support surface 5a of a reinforcing plate 5. In this constitution, the wafer is supported on the supporter to hold parallelness and flatness, thereby workability is improved during scribe action and property inspection. |
