| 摘要 |
PURPOSE:To detect a hair-like notch with high accuracy, by detecting whether a hair exists or not, by a one-dimensional optical scanner, and deciding as defective in case when the tip coordinates of the hair have entered into a prescribed quality deciding boundary circle. CONSTITUTION:A circular copper foil pattern (entity) 20-1 is placed on a table Y, is scanned by a one-dimensional optical scanner, reflective information is binary-coded, and whether a hair 21-1 exists or not, and coordinates of its root position P1 and the tip P2 are extracted. Subsequently, centering around an intersection point P3 of a scanning line 23'' and the entity 20-1, and P1, a circle of a radius R1 showing the outside circumference of the entity 20-1 is drawn, and centering around an intersection point C1, a quality deciding boundary circle 22-1 of a radius R2 being equal to an inspection standard is set. When the tip coordinates of the hair 21-1 have entered into this circle, it is decided as defective. Therefore, a hair-like notch on the copper foil pattern can be decided with high accuracy. |
