VERFAHREN UND EINRICHTUNG ZUR KORPUSKULARBESTRAHLUNG EINES TARGETS,申请号DD19800224257-传众专利搜索

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发明名称	VERFAHREN UND EINRICHTUNG ZUR KORPUSKULARBESTRAHLUNG EINES TARGETS
摘要
申请公布号	DD158197(A3)	申请公布日期	1983.01.05
申请号	DD19800224257	申请日期	1980.10.01
申请人	HAHN,EBERHARD,DD	发明人	HAHN,EBERHARD,DD
分类号	H01L21/027;H01J37/30;H01L21/30;(IPC1-7):H01J37/30	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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