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发明名称
Image distortion-free, image rotation-free electron microscope.
摘要
申请公布号
EP0068896(A2)
申请公布日期
1983.01.05
申请号
EP19820303426
申请日期
1982.06.30
申请人
HITACHI, LTD.
发明人
SHII, KAZUO;KOBAYASHI, HIROYUKI;KUBOZOE, MORIOKI;ISAKOZAWA, SHIGETO
分类号
H01J37/141;H01J37/04;H01J37/10;H01J37/26;(IPC1-7):H01J37/26
主分类号
H01J37/141
代理机构
代理人
主权项
地址
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