Etching process with vibrationally excited SF6.,申请号EP19820102404-传众专利搜索

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发明名称	Etching process with vibrationally excited SF6.
摘要
申请公布号	EP0068077(A1)	申请公布日期	1983.01.05
申请号	EP19820102404	申请日期	1982.03.23
申请人	INTERNATIONAL BUSINESS MACHINES CORPORATION	发明人	CHUANG, TUNG JUNG;COBURN, JOHN WYLLIE;KAY, ERIC
分类号	H01L21/302;C23F1/12;H01L21/3065;H01L21/3213;(IPC1-7):H01L21/30;C23F1/00	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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