| 摘要 |
PURPOSE:To increase the detection sensitivity of a solid mass spectrograph by providing a means of introducing an active gas with a given pressure into an ion source through variable leak valves. CONSTITUTION:A means of introducing an active gas, such as oxygen or a halogen such as chlorine, with a given gas pressure into an ion source through variable leak valves 24-26 is provided. Variable leaks 21-23 are active-gas introducing paths having the valves 24-26, and introduce the gas in different ways. By the means mentioned above, ions developing from a sample 16 are introduced into a mass spectrograph through slits 17-19. |
