| 摘要 |
PURPOSE:To keep an adhesive strength at high frequencies, by providing a round at least to one circumference of a lower or upper major plane of a flat-shaped oscillator, bonding an elastic body to this round and supporting the flat-shaped oscillator. CONSTITUTION:A round 5 is provided on a major plane 4 of a quartz plate with vapor-deposition of gold. The major plane 4 of the quartz plate provided with the round 5 and a thin plate made of nickel or the like being a supporting body and also external frame are formed incorporatedly 6 with etching process, and bonded at once with ultrasonic wave welding or thermal pressing, allowing to keep the adhesive strength even at high frequencies. The bonded parts are disconnected afterwards. |
