| 摘要 |
PURPOSE:To adjust the capacity of an internal compensating capacitor by a method wherein the internal compensating capacitor deciding band width is provided with a short-circuited metal wire and the metal wire is cut. CONSTITUTION:The first insulating film 3 is formed on an N type substrate 1. The second insulating films 5, 6 are thinly grown oxide films for capacitor layer insulation. The third insulating film 4 is formed with a thick oxide film. The first metal wires 8, 9 form one metal electrode of a main capacitor and that of a trimming element capacitor. The second metal wire 10 is for short circuit. The third metal wire is contacted through a high-density impurity layer 2 which is the other electrodes of all the capacitors including the trimming element capacitor and main capacitor and a contact window 7. This can reduce the capacity of the capacitor by cutting the second metal wire 10. |
