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发明名称
ROTATIONSTROCKNER FUER HALBLEITERMATERIALIEN
摘要
申请公布号
DE3821067(A1)
申请公布日期
1989.01.05
申请号
DE19883821067
申请日期
1988.06.22
申请人
ALPHA SCIENCE LABORATORY CO., LTD., ICHIKAWA, CHIBA, JP
发明人
AIGO, SEIICHIRO, TOKIO/TOKYO, JP
分类号
H01L21/304;B04B3/00;F26B5/08;H01L21/00;(IPC1-7):F26B5/08;H01L21/68
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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