| 摘要 |
PURPOSE:To enable to draw with high precision even when unevenness exists in the speed of a table for beam drawing device by a method wherein unevenness of speed of the table is detected by comparison with the basic pulses, and the beam is made to follow after the correct position by the detected signal thereof. CONSTITUTION:Laser pulses 23 for measurement sent from a Y laser measuring system and the basic laser pulses 24 sent from a basic laser pulse generating circuit 25 are compared in a comparison counter 26, and speed unevenness correction data 27 are outputted according to the difference between the number of pulses of both. Data 27 are inputted in a data process circuit 28, conversion into an analog signal and regulation of the level are performed, and is outputted from the circuit 28 as a speed unevenness correction analog signal 29. The signal 29 thereof is added to a Y axis deflection amplifier 30. As a result, a corrected voltage is applied to a Y axis deflecting electrode 31, and an electron beam 33 injected from an electron gun 32 is made to perform scanning following after speed unevenness of the table 21. |
