| 摘要 |
An integrated circuit probe station comprises a table having a substantially planar upper surface, an IC probe positioned over the table in spaced relationship with the upper surface of the table, a chuck carrier, and a chuck. The chuck carrier has a substantially planar lower surface that is positioned in confronting relationship with the upper surface of the table, and a film of viscous material is interposed between the upper surface of the table and the lower surface of the chuck carrier, whereby the chuck carrier may be moved manually relative to the table in horizontal directions while resting on the table. The chuck is carried on the chuck carrier and is movable vertically relative to the chuck carrier. A mechanical prime mover is effective between the chuck carrier and the chuck for bringing about vertical movement of the chuck relative to the chuck carrier. |
