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发明名称
ACOUSTIC DISTANCE OR THICKNESS MEASUTING DEVICE
摘要
申请公布号
GB2020808(B)
申请公布日期
1982.12.22
申请号
GB19790014935
申请日期
1979.04.30
申请人
TENCOR INSTRUMENTS
发明人
分类号
G01R27/02;G01R31/26;G01S15/32;(IPC1-7):G01S9/68
主分类号
G01R27/02
代理机构
代理人
主权项
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