| 摘要 |
PURPOSE:To present a plasma X-ray source stable with a long life, by providing a position variable means longitudinally of an anode in the X-ray source and forming the anode adjustable with a position of its point end. CONSTITUTION:The numeral 1 is a bar-shaped cathode, 2 is a bar-shaped anode, 11 is a vacuum vessel, 12 is a guide of the anode 2, 13, 14, 15 are the first, second and third supporting members respectively, 16, 17, 18 are the first, second and third piezo-electric elements respectively, 19 is a vacuum chamber and 20 is a differential exhaust chamber. Now a point end of the anode 2 is worn, if adjustment of a position is requied for the point end, voltage of the second piezo-electric element 17 is removed, then voltage is applied to the first piezo- electric element. In this way, the anode 2 is held by the second piezo-electric element 17 and arranged free from the first piezo-electric element. Then the third piezo-electric element 18, if its voltage is removed, is extended to the upward direction in the drawing, and the anode 2 can be lifted by the amount of extension of the piezo-electric element 18. |
