| 摘要 |
PURPOSE:To enable the thorough obsevation of a sample with a large area by arranging a scanner on the side of a sample retaining base while an ultrasonic wave transmitting/receiving element and a scanner thereof are provided thereabove. CONSTITUTION:An ultrasonic wave transmitting/receiving element 26 and a scanner thereof are incorporated in a housing section 41 at the tip of a supporting member 40 to effect a scanning in the direction X. A displacement detector 42 is arranged at one end of the vibration which occurs in the direction x of a holder 27. An opening section 43 is provided below the housing section 41 to transmit or receive ultrasonic waves therethrough. A support body 40 is molded in an arch shaped and a smaple retaining base 45 is arranged at the bottom of the housing section 41 to retain a sample 44. The sample retaining base 45 can be moved at a low speed in the directtion y by a moving mechanism. In this manner, the ultrasonic wave transmitting/receiving element 26 is reciprocated at a high speed in the direction x while the sample 44 is moved at a low speed in the direction y with the moving mechanism through the sample retaining base 45 thereby enabling two dimensional secanning of the sample 44 by ultrasonic waves. The displacement detector 45 catches the vibration of the ultrasonic wave transmitting/ receiving element in the direction x to detect and control the amplitude thereof. |
