| 摘要 |
PURPOSE:To obtain highly accurate positioning reproducibility by correcting the intersecting degree of an air bearing supporting linear motor driving stage and removing the stage rotational shaft error of a positioning point at the time of quick intermittent driving. CONSTITUTION:When a start signal phi2 is inputted, the 2 deg. side of a binary counter is turned on through an OR gate circuit 13 and an integrator 16 is actuated by the output of a differential amplifier 15, generates a speed reference signal waveform and excites driving coils 6, 6', so that a stage starts to move while being accelerated. Accompanied with the movement of the stage, stage present position information XR, X'R are changed and the values of counters 10, 10' are reduced momentarily. The driving coils 6, 6' are independently driven respectively by the outputs of the counters 10, 10' to control the coils 6, 6' to desired points. |
