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发明名称
VACUUM DEPOSITION APPARATUS
摘要
申请公布号
JPH03159989(A)
申请公布日期
1991.07.09
申请号
JP19890295604
申请日期
1989.11.14
申请人
FUJITSU LTD
发明人
TOMIOKA TAKESHI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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