| 摘要 |
PURPOSE:To obtain an oscillator using a secondary contour oscillation mode, by providing an appropriate electrode on an oscillator containing an oscillating part and a supporting part formed in a body. CONSTITUTION:A supporting part 13 has such measurement and shape with which the oscillation mode is hardly disturbed at an oscillating part 11 and at the same time the displacement is hardly caused at a sealed part 18. Thus an effect caused when the part 18 is joined mechanically and electrically can be avoided. Then an electrode shown in the figure is formed by a photolithographic technique on an oscillator in which the supporting part 13 with which no displacement is caused at the part 18 is unified with the oscillating part 11. In such way, an oscillator is obtained with a high resonance frequency that so far has the limitation just by the basic contour oscillation mode. |
