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发明名称
VERFAHREN UND EINRICHTUNG ZUR GEGENSEITIGEN AUSRICHTUNG VON OBJEKTEN BEI ROENTGENSTRAHL- UND KORPUSKULARSTRAHL-BELICHTUNGSVORGAENGEN
摘要
申请公布号
DE3121666(A1)
申请公布日期
1982.12.16
申请号
DE19813121666
申请日期
1981.05.30
申请人
IBM DEUTSCHLAND GMBH
发明人
BOHLEN,HARALD;ENGELKE,HELMUT,DR.;GRESCHNER,JOHANN,DR.;MUEHL,REINHOLD;NEHMIZ,PETER,DR.;TRUMPP,HANS-JOACHIM,DR.
分类号
G03B27/32;G03F9/00;H01J37/304;H01L21/027;H01L21/68;(IPC1-7):G03F9/00;H01L21/30;H01J37/20
主分类号
G03B27/32
代理机构
代理人
主权项
地址
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