| 摘要 |
PURPOSE:To measure a shape with high accuracy even in case of a nonconductive substance, by forming a thin conductive film on the surface of a nonconductive substance to be measured, and electrically detecting a contact of a probe, when measuring the shape. CONSTITUTION:On the surface of a substance to be measured M, which is nonconductive itself, such as a gypsum model or a plastic model, conductive paint is applied uniformly, or a thin conductive film 25 is formed by plating treatment, etc. One terminal of an electric power supply E is connected to a probe 20 through an electric wire 21, and the other terminal is connected to the film 25 through an electric wire 22. When the substance to be measured M and the probe contact with each other, a current detector 23 detects a current and generates a signal S. Synchronizing with this signal S, a computer 26 reads data of XYZ direction position detectors DX-DZ of the probe and stores them in a memory 27. |
