| 摘要 |
PURPOSE:To obtain the piezoelectric element capable of obtaining an angular velocity sensor hard to generate irregularity in characteristics even when atmospheric temp. changes. CONSTITUTION:The piezoelectric element 10 for an angular velocity sensor contains a piezoelectric substrate 12. The piezoelectric substrate 12 is formed from piezoelectric ceramic layers 14, 16, 18 having a plurality of voids. The piezoelectric ceramic layer 16 of the central part in the thickness direction of the piezoelectric substrate 12 has voids larger than those of the other piezoelectric ceramic layers 14, 18. Electrodes 20, 22 are formed to both surfaces of the piezoelectric substrate 12. |
