METHOD OF INSPECTING DEFLECTION OF SEMICONDUCTOR SUBSTRATE,申请号JP19820022203-传众专利搜索

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发明名称	METHOD OF INSPECTING DEFLECTION OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号	JPS57204141(A)	申请公布日期	1982.12.14
申请号	JP19820022203	申请日期	1982.02.16
申请人	INTERN BUSINESS MACHINES CORP	发明人	DEEBITSUDO PERII HOOTSU;JIYASUBUIA SHINGU JIYASUPARU;UORUDEN BENETSUTO ROOSHIYU;MAIKERU JIEEMUZU SARIBUAN
分类号	G01B11/24;G01B11/30;H01L21/66	主分类号	G01B11/24
代理机构		代理人
主权项
地址

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