发明名称 Method for manufacturing thin and flexible ribbon wafer of semiconductor material and ribbon wafer
摘要 A method for manufacturing a thin and flexible ribbon wafer of semiconductor material such as germanium, silicon, selenium, tellurium, PbS, InSb, ZnTe, PbSe, InAs, InP, GaSb, PbTe, ZnS, Bi2Te3, and mixtures thereof comprises melting the semiconductor material at a temperature within the range from a melting point thereof to 300 DEG C. above the melting point to form a uniform melt; ejecting under a pressure the melt through a nozzle against a cooling surface of a moving substrate to cool very rapidly a jet flow of the melt at a cooling rate of 1,000 DEG C. to 1,000,000 DEG C./sec to form the ribbon type thin and flexible wafer of fine and compact microscopic structure having a large mechanical strength and an excellent electrical property. It is possible to add to the melt various additives as fluxes or impurities such as B, P, BP, Sb Sn, As, B, P, Sb, In, Al and alloys intermetallic compounds, and conjugates thereof. The thin ribbon wafer as grown is preferably heated at a temperature from within the range 500 DEG C. to the melting point for a time within the range from 0.1 second to one week. The invention also provides a thin and flexible ribbon wafer of semiconductor material manufactured by the above mentioned process.
申请公布号 US4363769(A) 申请公布日期 1982.12.14
申请号 US19810225242 申请日期 1981.01.15
申请人 TSUYA, NOBORU 发明人 TSUYA, NOBORU;ARAI, KENICHI
分类号 B22D11/06;C22C1/00;C30B11/00;C30B11/14;C30B15/06;C30B29/64;H01L21/208;H01L31/04;H01L31/18;(IPC1-7):B29D7/02 主分类号 B22D11/06
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