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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS57204148(A)
申请公布日期
1982.12.14
申请号
JP19810088256
申请日期
1981.06.10
申请人
TOKYO SHIBAURA DENKI KK
发明人
KUROSAWA AKIRA
分类号
H01L21/302;H01L21/3065;H01L21/31;H01L21/3105;H01L21/76;H01L21/762
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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