| 摘要 |
PURPOSE:To eliminate an error signal caused by the variance of concentration, by branching a passage for a flow rate measurement objective gas to two passages and connecting a trace gas charging passage to only one passage and connecting an analysis meter to the other passage. CONSTITUTION:A passage 1 for a flow rate measurement objective gas 1 is partitioned by a partition wall 6 and is branched to two passages 1a and 1b. A trace gas charging passage 2 is connected to one passage 1b, and a prescribed flow rate A of component gas in the flow rate measurement objective gas is charged and mixed in this passage 2. An analysis meter 7 which analyzes the concentration variation of component gas in the flow rate measurement objective gas during a time (t), when the flow rate measurement objective gas reaches the second position X2 from the first position X1, is connected to the other passage 1a. Thus, an error signal caused by the variance of concentration is eliminated. |
