| 摘要 |
PURPOSE:To simplify positioning or the like in an electron beam drawing apparatus by providing a clamping plate. CONSTITUTION:A reference piece 13 contacted with the upper surface of a cassette 4 mounted on the upper surface of a table 1 and contained extensibly at the end on a recess 3, and a clamping plate elevationally movable in the vicinity of the lower part of the recess are provided, and a clamping lever 7, clamping springs 9, 11, and unclamping member which rockes the lever 7 against the springs are arranged on the lower surface of the clamping plate. A cassette 4 is inserted between the clamping plate and the piece 13, and a mechanism for urging and holding the cassette to the piece 13 by the springs 9, 11 is provided. |
