| 摘要 |
PURPOSE:To improve the positioning accuracy of a mask matching marker by exposing and forming a marker made of metal on a substrate. CONSTITUTION:A frame 6 is attached to the periphery of a cross marker pattern instead of a conventional cross marker pattern, the outer periphery 7 in the frame is constructed to be covered with an insulating layer 4, and a metal pattern of the marker 3 made of aluminum and copper alloy is exposed. In this case, the bonded part 5 of the cross marker to an SiO2 film 2 and the bonded part of the film 2 at the inside part of the marker frame 6 are undercut, but since the periphery 7 is secured by the layer 4, the displacement of position and the deformation can be suppressed. |
